Reversal Transfer Machine (WRM-02 Type)
It is a device for inverting and transferring silicon wafers.
- The handling of silicon wafers using an outer peripheral hanging method allows for the transfer of ultra-thin wafers. - The robot's hand is made of ceramic, and Teflon is used for the clamps in the inversion section. - There are three carrier ports, with two used for loading and unloading, and the remaining one used as a buffer.
- Company：ジャステム
- Price：Other
